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6CCVD Research

Boron Doped Ultrananocrystalline Diamond Films on Porous Silicon - Morphological, Structural and Electrochemical Characterizations

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2015-11-20
JournalMaterials Research
AuthorsLilian Mieko da Silva, Marta dos Santos, MaurĆ­cio Ribeiro Baldan, A.F. Beloto, N.G. Ferreira
InstitutionsNational Institute for Space Research
Citations10

Abstract

Section titled ā€œAbstractā€

Boron doped ultrananocrystalline diamond (BDUND) films were grown and characterized on porous silicon (PS) substrates. PS samples were prepared from n-type monocrystalline silicon wafers (100) with 1-20 Ī©.cm of resistivity, by electrochemical etching, using HF-acetonitrile solution as electrolyte. BDUND films were grown by Hot Filament Chemical Vapor Deposition using CH4, H2 and Ar. The doping process consisted of an additional hydrogen line, passing through a bubbler containing B2O3 dissolved in methanol, with boron/carbon ratio of 20000 ppm in solution. Raman spectroscopy and X-Ray diffraction were used to evaluate the quality of the films. Scanning electron microscopy was used for morphological characterization, and confirmed that the films covered the pores without filling them. Electrochemical response and capacitance behavior of the electrodes were explored, by cyclic voltammetry. Samples presented high capacitance, confirming that BDUND/PS electrodes are promising for application as electrochemical capacitors.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2012 - Investigation of photoluminescence efficiency of n-type porous silicon by controlling of etching times and applied current densities [Crossref]
  2. 2003 - Comparison of nano-porous silicon prepared by photoelectrochemical etching in HF-ethanol and HF-acetonitrile solutions
  3. 2008 - Morphological and optical characteristics of porous silicon produced by anodization process in HF-acetonitrile and HF-ethanol solutions [Crossref]
  4. 2014 - Reorganization of porous silicon: effect on epitaxial layer quality and detachement [Crossref]
  5. 2013 - Sensitivity improvement of free-standing porous silicon rugate filters for isopropanol vapor detection by applying lateral pressure differences [Crossref]
  6. 2013 - White electroluminescence from ITO/porous silicon junctions [Crossref]
  7. 2005 - Nanodiamond films growth on porous silicon substrates for electrochemical applications [Crossref]
  8. 2014 - Hybrid gold/porous silicon thin films for plasmonic solar cells [Crossref]
  9. 2014 - Diamond synthesis by chemical vapor deposition: the early years [Crossref]

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