Skip to content

Ductile Mode Behavior of Silicon During Scribing by Spherical Abrasive Particles

MetadataDetails
Publication Date2016-01-01
JournalProcedia CIRP
AuthorsArkadeep Kumar, A. M. Kovalchenko, Vanessa Pogue, E. A. Pashchenko, Shreyes N. Melkote
InstitutionsV. Bakul Institute for Superhard Materials, Georgia Institute of Technology
Citations32

Reducing surface and subsurface damage in cutting brittle materials using fixed abrasive processes like wire sawing is an important challenge. This paper investigates the effect of size and shape of abrasives on ductile mode cutting of single crystal silicon. Diamond and tungsten carbide abrasives of different shapes (irregular and spherical) deposited on a steel surface are used to scribe silicon and the material removal mode is analyzed. Experiments show that spherical abrasives enhance ductile mode cutting when compared to irregular shapes, yielding a smoother surface and significantly fewer micro-cracks.

  1. 1990 - Ductile - Regime Machining of Germanium and Silicon [Crossref]
  2. 2013 - Studies of the Ductile Mode of Cutting Brittle Materials (a Review) [Crossref]
  3. 1972 - Phase Transition in Diamond - Structure Crystals During Hardness Measurements [Crossref]
  4. 2014 - On the Cracks Self-Healing Mechanism at Ductile Mode Cutting of Silicon [Crossref]
  5. 1996 - Phase Transformations During Microcutting Tests on Silicon [Crossref]
  6. 2005 - Multiple Phase Silicon in Submicrometer Chips Removed by Diamond Turning [Crossref]
  7. 2001 - Raman Microspectroscopy Analysis of Pressure-Induced Metallization in Scratching of Silicon [Crossref]
  8. 2001 - Brittle-Ductile Transition in Diamond Cutting of Silicon Single Crystals [Crossref]