High resolution, monochromatic x-ray topography capability at CHESS
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2016-01-01 |
| Journal | AIP conference proceedings |
| Authors | K. D. Finkelstein, Ryan M. Jones, Alan Pauling, Zuben P. Brown, Alvarado Tarun |
| Institutions | Cornell University, St. Maryās College of Maryland |
| Citations | 1 |
Abstract
Section titled āAbstractāCHESS has a monochromatic x-ray topography capability serving continually expanding user interest. The setup consists of a beam expanding monochromator, 6-circle diffactometer, and CHESS designed CMOS camera with real time sample-alignment capability. This provides rocking curve mapping with angle resolution as small as 2 Āµradians, spatial resolution to 3 microns, and field of view up to 7mm. Thus far the capability has been applied for: improving CVD-diamond growth, evaluating perfection of ultra-thin diamond membranes, correlating performance of diamond-based electronics with crystal defect structure, and defect analysis of single crystal silicon carbide. This paper describes our topography system, explains its capabilities, and presents experimental results from several applications.