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Thermoelectric performance of super lattice structured DLC Film

MetadataDetails
Publication Date2016-01-01
JournalThe Proceedings of Ibaraki District Conference
AuthorsTakuya Hashimoto, Masashi NAKAMURA
InstitutionsIbaraki University

This paper presents an investigation of the thermoelectric performance of super lattice structure diamond-like carbon (DLC) Films deposited on glass substrates using unbalanced magnetron sputtering (UBMS). It was measured Seebeck coefficient and resistivity of the DLC film. Then, to evaluate its thermoelectric performance. The super lattice structure DLC films showed a Seebeck effect, and they had p-type semiconductor characteristic. The super lattice structure DLC than a W doped DLC single layer film is the Seebeck coefficient is increased. The superlattice structure DLC than a W doped DLC single layer film is the specific resistance is increased. Power factor (PF) of the superlattice of the DLC film was lower than the W doped DLC single layer. Results show that the PF quality of superlattice structure DLC films was affected strongly by the magnitude of the specific resistance.