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High heat flux two-phase cooling of electronics with integrated diamond/porous copper heat sinks and microfluidic coolant supply

MetadataDetails
Publication Date2016-05-01
AuthorsJames W. Palko, Hyoungsoon Lee, Damena Agonafer, Chi Zhang, Ki Wook Jung
InstitutionsUniversity of California, Irvine, Stanford University
Citations30

We here present an approach to cooling of electronics requiring dissipation of extreme heat fluxes exceeding 1 kW/cm2 over ∼1 cm2 areas. The approach applies a combination of heat spreading using laser micromachined diamond heat sinks; evaporation/boiling in fine featured (5 µm) conformal porous copper coatings; microfluidic liquid routing for uniform coolant supply over the surface of the heat sink; and phase separation to control distribution of liquid and vapor phases. We characterize the performance of these technologies independently and integrated into functional devices. We report two-phase heat transfer performance of diamond/porous copper heat sinks with microfluidic manifolding at full device scales (0.7 cm2) with heat fluxes exceeding 1300 W/cm2 using water working fluid. We further show application of hydrophobic phase separation membranes for phase management with heat dissipation exceeding 450 W/cm2 at the scale of a single extended surface (∼300 µm).