Thermal conductivity of nanocrystalline diamond films grown by hot filament chemical vapor deposition
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2016-05-27 |
| Journal | physica status solidi (a) |
| Authors | Markus Mohr, Kai BrĆ¼hne, H.āJ. Fecht |
| Institutions | UniversitƤt Ulm |
| Citations | 4 |
Abstract
Section titled āAbstractāNanocrystalline diamond films were grown by hot filament chemical vapor deposition. The thermal conductivity of the films was measured using the 3Ļāmethod. Nanocrystalline diamond films grown under the presented growth conditions are rather homogeneous in film properties within the entire film thickness and deposited area. The considerably smaller thermal conductivities, compared to single crystal diamond can be explained by an influence of the grain boundaries with varying grain sizes. We use a theoretical approach to describe the thermal conductivity of nanocrystalline materials to characterize the grain boundaries thermal boundary conductivity also with respect to the growth conditions.