Skip to content

Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection

MetadataDetails
Publication Date2017-05-24
JournalSensors
AuthorsMaira Possas-Abreu, Farbod Ghassemi, Lionel Rousseau, Emmanuel Scorsone, Emilie Descours
InstitutionsESI Group (France), Laboratoire d’électronique, systèmes de communication et microsystèmes
Citations26

This paper reports on the development of an autonomous instrument based on an array of eight resonant microcantilevers for vapor detection. The fabricated sensors are label-free devices, allowing chemical and biological functionalization. In this work, sensors based on an array of silicon and synthetic diamond microcantilevers are sensitized with polymeric films for the detection of analytes. The main advantage of the proposed system is that sensors can be easily changed for another application or for cleaning since the developed gas cell presents removable electrical connections. We report the successful application of our electronic nose approach to detect 12 volatile organic compounds. Moreover, the response pattern of the cantilever arrays is interpreted via principal component analysis (PCA) techniques in order to identify samples.

  1. 2014 - Humans can discriminate more than 1 trillion olfactory stimuli [Crossref]
  2. 1998 - ‘Electronic noses’ and their application to food [Crossref]
  3. 2001 - An electronic nose for the discrimination of forane 134a and carbon dioxide in a humidity controlled atmosphere [Crossref]
  4. 2003 - Peer reviewed: detection of explosives by electronic noses [Crossref]
  5. 2007 - An electronic nose in the discrimination of patients with asthma and controls [Crossref]
  6. 2009 - An optoelectronic nose for the detection of toxic gases [Crossref]
  7. 2010 - Diagnostic performance of an electronic nose, fractional exhaled nitric oxide, and lung function testing in asthma [Crossref]
  8. 2011 - Advances in electronic-nose technologies developed for biomedical applications [Crossref]
  9. 1982 - Analysis of discrimination mechanisms in the mammalian olfactory system using a model nose [Crossref]