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A CVD Diamond-Based Photodetector for the Visible and Near-IR Spectral Range

MetadataDetails
Publication Date2017-12-01
JournalTechnical Physics Letters
AuthorsV. A. Kukushkin, D. B. Radischev, M. A. Lobaev, Š”. А. БогГанов, A. V. Zdoroveischev
InstitutionsInstitute of Applied Physics, N. I. Lobachevsky State University of Nizhny Novgorod
Citations4

A photodetector for the visible and near-IR spectral range has been created on the basis of a chemical- vapor-deposited diamond modulation-doped with boron. The detected electromagnetic radiation is absorbed in a thin Cr (7 nm)-Au (5.5 nm) bimetallic sublayer deposited on the surface of a modulationdoped diamond film comprising a highly doped (up to 5 Ɨ 1019 cm-3) 3-nm-thick delta-layer, low-doped (~1017 cm-3) 800-nm-thick sublayer, and highly doped (1020 cm-3) ~10-μm-thick sublayer with an ohmic Ti(50 nm)/Pt(15 nm)/Au(30 nm) contact. Holes generated in the bimetallic sublayer diffuse into diamond and are accelerated by an electric field in the low-doped sublayer to form a response photocurrent. The ampere/watt responsivity of the photodetector reaches 1 μA/W at a radiation wavelength of 445 nm and 0.18 μA/W at 1.06 μm.

  1. 1981 - Physics of Semiconductor Devices