Исследование структурных и морфологических свойств HPHT алмазных подложек
At a Glance
Section titled “At a Glance”| Metadata | Details |
|---|---|
| Publication Date | 2018-01-01 |
| Journal | Физика и техника полупроводников |
| Authors | П.А. Юнин, П. В. Волков, Ю Н Дроздов, А.В. Колядин, С. А. Королев |
Abstract
Section titled “Abstract”AbstractThe morphological and structural properties of a series of high-pressure high-temperature (HPHT) single-crystal diamond substrates are comprehensively studied by white-light optical interference microscopy, atomic-force microscopy, and X-ray diffraction analysis. Procedures that provide a means for characterizing the substrate parameters most critical for epitaxial application with the laboratory equipment are described. It is shown that the jewelry-type characterization of diamond substrates is insufficient to assess the possibility of their use for the epitaxial growth of chemical-vapor-deposited (CVD) diamond.