Nanoladder Cantilevers Made from Diamond and Silicon
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2018-02-07 |
| Journal | Nano Letters |
| Authors | M HĆ©ritier, Alexander Eichler, Ying Pan, Urs Grob, Ivan Shorubalko |
| Institutions | ETH Zurich, Swiss Federal Laboratories for Materials Science and Technology |
| Citations | 46 |
Abstract
Section titled āAbstractāWe present a ānanoladderā geometry that minimizes the mechanical dissipation of ultrasensitive cantilevers. A nanoladder cantilever consists of a lithographically patterned scaffold of rails and rungs with feature size ā¼100 nm. Compared to a rectangular beam of the same dimensions, the mass and spring constant of a nanoladder are each reduced by roughly 2 orders of magnitude. We demonstrate a low force noise of 158<sub>-42</sub><sup>+62</sup> zN and 190<sub>-33</sub><sup>+42</sup> zN in a 1 Hz bandwidth for devices made from silicon and diamond, respectively, measured at temperatures between 100-150 mK. As opposed to bottom-up mechanical resonators like nanowires or nanotubes, nanoladder cantilevers can be batch-fabricated using standard lithography, which is a critical factor for applications in scanning force microscopy.