Reducing intrinsic energy dissipation in diamond-on-diamond mechanical resonators toward one million quality factor
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2018-09-28 |
| Journal | Physical Review Materials |
| Authors | Haihua Wu, Liwen Sang, Yumeng Li, Tokuyuki Teraji, Tiefu Li |
| Institutions | Institute of Microelectronics, Tsinghua University |
| Citations | 30 |
Abstract
Section titled āAbstractāThis paper reports a batch fabrication of ultrahigh quality-factor single-crystal diamond microelectromechanical system resonators on diamond by using a smart-cut method and atomic scale etching of the defects within the resonators. As a result, the intrinsic energy dissipation induced by bulk defects is markedly reduced and quality factors over one million are realized, which can lead to the fabrication of highly sensitive physical and chemical sensors with high reliability.