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Characterisation of thin boron-doped diamond films using Raman spectroscopy and chemometrics

MetadataDetails
Publication Date2018-12-26
JournalAnalytical Methods
AuthorsPeter Knittel, Robert Stach, Taro Yoshikawa, Lutz Kirste, Boris Mizaikoff
InstitutionsUniversitƤt Ulm, Fraunhofer Institute for Applied Solid State Physics
Citations17

A non-destructive chemometric method to determine thickness and boron concentration of as-deposited, thin, heavily doped diamond films by Raman microscopy.