Precision Micro-Optical Components in Single Crystal Diamond by Deep Reactive Ion Etching
At a Glance
Section titled âAt a Glanceâ| Metadata | Details |
|---|---|
| Publication Date | 2019-01-01 |
| Authors | Adrien Toros, Marcell Kiss, Teodoro Graziosi, Hamed Sattari, P. Gallo |
| Institutions | Ăcole Polytechnique FĂ©dĂ©rale de Lausanne |
| Citations | 1 |
Abstract
Section titled âAbstractâWe present a method to fabricate fully released thick single crystal diamond components and demonstrate cylindrical and compound refractive lenses. The process is based on the use of a thick SiO2 hard mask for the O2 plasma based deep reactive ion etching of the 150 ”m thick diamond plate.