Single Crystal Diamond Micro-Disk Resonators by Focused Ion Beam Milling
At a Glance
Section titled âAt a Glanceâ| Metadata | Details |
|---|---|
| Publication Date | 2019-01-01 |
| Authors | Teodoro Graziosi, Sichen Mi, Marcell Kiss, Niels Quack |
| Institutions | Ăcole Polytechnique FĂ©dĂ©rale de Lausanne |
Abstract
Section titled âAbstractâWe present a fabrication scheme for single crystal diamond micro-disk resonators based on oxygen plasma DRIE and multidirectional FIB milling. Acid cleaning and thermal annealing are used to remove the FIB induced crystal damage and we achieve optical quality factors of the order of 5000 in the S- and C-bands.