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Sub-micron structuring/texturing of diamond-like carbon-coated replication masters with a femtosecond laser

MetadataDetails
Publication Date2020-02-01
JournalApplied Physics A
AuthorsAleksandra Michalek, Shaojun Qi, Afif Batal, Pavel Penchev, Hanshan Dong
InstitutionsUniversity of Birmingham, Manufacturing Technology Centre (United Kingdom)
Citations17
AnalysisFull AI Review Included
  • Functionalization of DLC Masters: Femtosecond (fs) laser processing was successfully optimized to generate uniform Laser-Induced Periodic Surface Structures (LIPSS) on thin Diamond-Like Carbon (DLC) coatings applied to 316L stainless steel replication masters.
  • Optimized Structure: Uniform LIPSS were achieved using fluences between 91-119 mJ/cm2 and 33-47 total pulses per spot (ppstotal), resulting in a periodicity of 700-800 nm.
  • Tribological Preservation: The advantageous low Coefficient of Friction (CoF) of the DLC coating (mean CoF ~0.12) was retained after fs laser texturing, confirming its suitability for low-adhesion applications like micro-injection molding.
  • Hardness Reduction: A significant reduction in nanohardness was measured, dropping from 22 GPa (as-received) to 4-9 GPa (laser-treated), indicating sensitivity to the fs processing parameters.
  • Structural Modification: Raman spectroscopy confirmed that fs irradiation led to the formation of a thin, graphitized surface layer (indicated by an increase in I(D)/I(G) ratio to > 1.0 and a G peak shift to 1590 cm-1), while the bulk DLC structure remained largely amorphous.
  • Wear Mechanism: During tribological testing, the thin graphitized layer was observed to fill the valleys of the LIPSS ripples, effectively polishing the surface but maintaining the overall low friction performance.
  • Value Proposition: The technology enables the creation of functionalized replication masters that benefit from both the lubricating properties of DLC and the added functionality of sub-micron surface textures (LIPSS).
ParameterValueUnitContext
Substrate Material316L Stainless Steel-Replication master base
DLC Film Thickness2-5”mDeposited via PACVD
DLC Hardness (As-received)22GPaEquivalent to HV 2500
Laser Typefs Ytterbium-doped fiber-Source for structuring
Laser Wavelength (λ)1030nmNear infrared
Pulse Duration310fsUltrashort pulse characteristic
Beam Spot Diameter (d)40”mAt 1/e2 intensity
Optimized Fluence (F) Range91-119mJ/cm2For uniform LIPSS generation
LIPSS Periodicity (Λ)700-800nmLow Spatial Frequency LIPSS (LSFL)
LIPSS Ripple Height200nmAverage height across processed area
Hardness (Laser-treated)4-9GPaSignificant reduction post-processing
CoF (As-received DLC)0.12-Mean value, dry condition
Tribology CounterpartAlumina Ball-Hardness: 16 GPa (HV 1600)
Tribology Load1.47NEquivalent to 150 g
Raman G Peak Shift1509 to 1590cm-1Shift observed after fs treatment
I(D)/I(G) Ratio (Laser-treated)> 1.0-Indicates surface graphitization
GAXRD Incident Angle3°Used to analyze crystalline structure
  1. DLC Coating: Thin DLC films were deposited onto 316L stainless steel substrates using Plasma-Assisted Chemical Vapour Deposition (PACVD).
  2. Femtosecond Laser Processing: An fs laser (1030 nm, 310 fs) was used for structuring. The beam was focused to a 40 ”m spot.
  3. Process Parameter Optimization: Single-spot irradiation tests were conducted to identify the fluence and pulse number thresholds required to transition from HSFL (High Spatial Frequency LIPSS) to uniform LSFL (Low Spatial Frequency LIPSS).
  4. Large Area Scanning Strategy: Areas were structured using multiple pulse trains with a fixed hatch distance (h) of 3 ”m, resulting in a high pulse overlap (92.5%) in the Y direction. Fluence (F) and total pulses per spot (ppstotal) were varied to establish a processing window that ensured LIPSS uniformity without damaging the underlying DLC film.
  5. Topographical Analysis: Surface morphology and LIPSS geometry were analyzed using Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). Periodicity was quantified using 2D Fast Fourier Transformation (2D FFT).
  6. Structural Analysis (Raman): Raman spectroscopy (633 nm source) was used to analyze the short-range ordering of carbon bonds, focusing on shifts in the D and G peaks and changes in the I(D)/I(G) ratio to detect graphitization.
  7. Structural Analysis (GAXRD): Glancing Angle X-ray Diffraction (GAXRD) was performed at a low incident angle (3°) to check for long-range crystallization or substantial graphite formation within the DLC bulk.
  8. Mechanical Testing: Nanoindentation was performed using a 50 nm tip with a depth control of 400 nm (less than 10% of coating thickness) to measure the resulting nanohardness of the textured surface.
  9. Tribological Testing: Ball-on-plate reciprocating tests were conducted using an alumina ball (16 GPa) under a 1.47 N load to measure the Coefficient of Friction (CoF) both perpendicular and parallel to the LIPSS orientation.
  • Micro-Injection Molding Tools: The primary application, where DLC acts as a solid lubricant to reduce demolding forces and increase tool life. fs-LIPSS adds functional textures (e.g., for enhanced replication quality or anti-adhesion).
  • Functional Surface Replication: Manufacturing masters for replicating micro- and nano-structured surfaces onto polymers or other materials, especially for components requiring specific optical or fluidic properties.
  • Anti-Wear and Protective Coatings: Utilizing the preserved low CoF and high residual hardness (still significantly harder than steel) for durable, low-friction components in mechanical systems.
  • Biomedical Devices: Creating textured DLC surfaces for implants where surface topography is engineered to influence cellular response (e.g., osteoblast adhesion) while maintaining biocompatibility and wear resistance.
  • Optical and Sensing Components: Employing the precise 700-800 nm periodicity of the LIPSS for diffraction gratings, anti-reflective surfaces, or other microelectronic devices.