Skip to content

Hard X-ray wavefront correction via refractive phase plates made by additive and subtractive fabrication techniques

MetadataDetails
Publication Date2020-07-30
JournalJournal of Synchrotron Radiation
AuthorsFrank Seiboth, Dennis BrĂŒckner, Maik Kahnt, Mikhail Lyubomirskiy, Felix Wittwer
InstitutionsFriedrich Schiller University Jena, UniversitÀt Hamburg
Citations24
AnalysisFull AI Review Included

This research demonstrates the successful correction of spherical aberration in Beryllium (Be) Compound Refractive Lenses (CRLs) using custom-designed refractive phase plates fabricated via complementary additive and subtractive manufacturing techniques.

  • Core Achievement: Diffraction-limited nanofocusing was achieved at high X-ray energies (35 keV) using a polymer phase plate, increasing the Strehl ratio from 0.15 to 0.89.
  • Low Energy Correction (8.2 keV): A diamond phase plate, fabricated via femtosecond laser ablation, corrected a 50-lens Be CRL stack, improving the Strehl ratio from 0.10 to 0.70.
  • High Energy Correction (35 keV): A polymer phase plate, fabricated via two-photon polymerization (3D printing), corrected a 149-lens Be CRL stack, achieving a 95 nm FWHM coherent focal spot size.
  • Manufacturing Methods: The study validates both subtractive (laser ablation of diamond for high radiation resistance) and additive (polymer printing for high shape accuracy and smooth surfaces) methods for producing complex X-ray optics.
  • Engineering Significance: The ability to correct inherent manufacturing defects in CRLs allows large-aperture optics to operate at their theoretical diffraction limit, crucial for utilizing the high coherence of fourth-generation synchrotron sources and XFELs.
ParameterValueUnitContext
Low Energy Experiment8.2keVDLS I13-1 Beamline
High Energy Experiment35keVPETRA III P06 Beamline
Be CRL Stack (8.2 keV)50LensesTotal N; LCRL = 55 mm
Be CRL Stack (35 keV)149LensesTotal N; LCRL = 298 mm
Numerical Aperture (8.2 keV)0.88 x 10-3NAEffective aperture Deff = 191 ”m
Numerical Aperture (35 keV)0.18 x 10-3NAEffective aperture Deff = 236 ”m
Strehl Ratio (Diamond Corrected, 8.2 keV)0.70RatioImprovement from 0.10
Strehl Ratio (Polymer Corrected, 35 keV)0.89RatioImprovement from 0.15 (Diffraction-limited)
Corrected Focal Spot Size (8.2 keV)76nm (FWHM)Coherent focus size
Corrected Focal Spot Size (35 keV)95nm (FWHM)Coherent focus size
Diamond Phase Plate MaterialSingle-crystal CVD DiamondMaterialSubtractive fabrication
Polymer Phase Plate MaterialIP-S ResistMaterialAdditive fabrication (Nanoscribe)
Diamond Surface Roughness (Sa)0.32”mMeasured via LSM
Polymer Refractive Index Decrement (Estimated)2.124 x 10-7ÎŽppUsed for modeling at 35 keV
Diamond Phase Plate Transmission75%Total transmission of the plate itself
Polymer Phase Plate Transmission> 99%Highly transparent at 35 keV

The experimental methodology centered on fabricating custom phase plates based on wavefront errors measured via ptychography, followed by integration and re-characterization.

  1. Wavefield Characterization (Ptychography):

    • The complex illumination wavefield (probe) was retrieved using ptychography, a scanning coherent diffraction imaging technique, at the plane of the lens exit aperture.
    • The residual wavefront error (ΚΔ) was calculated by backpropagating the measured wavefield and subtracting a fitted ideal spherical wave (φs).
  2. Phase Plate Design:

    • The required thickness profile zpp(x, y) was calculated to introduce a phase shift (φpp) that precisely compensates the measured wavefront error (arg[ΚΔ] = -φpp).
  3. Subtractive Fabrication (Diamond, 8.2 keV):

    • Process: Femtosecond laser ablation was used on a CVD diamond substrate (300 fs pulses, 515 nm wavelength).
    • Procedure: The desired profile was achieved by sequentially ablating 70 layers, using high-precision motion control to define the structure based on the design goal. Diamond was chosen for its high thermal conductivity and low absorption, suitable for high-intensity XFEL applications.
  4. Additive Fabrication (Polymer, 35 keV):

    • Process: Two-photon polymerization (3D printing) was performed using a Nanoscribe Photonic Professional GT in dip-in lithography mode (IP-S resist).
    • Procedure: The structure was sliced and hatched with 200 nm spacing, utilizing a galvo scanner for fast writing. This method provided superior shape accuracy (error < 200 nm) and smooth surfaces, ideal for storage-ring applications.
  5. Integration and Alignment:

    • The fabricated phase plate was placed immediately behind the Be CRL stack casing (10.5 mm downstream at 8.2 keV; 20 mm downstream at 35 keV).
    • Fine alignment (typically 2 ”m or less) was achieved by monitoring the wavefront correction via real-time ptychography until the best focus was reached.

This technology is critical for advancing high-resolution X-ray optics, particularly in fields requiring high flux density and diffraction-limited performance.

  • Advanced X-ray Microscopy: Enables diffraction-limited nanofocusing (sub-100 nm) necessary for high-resolution scanning techniques like fluorescence imaging and ptychography, especially when investigating thick samples.
  • Fourth-Generation Synchrotron Sources: Provides the necessary aberration correction for large-aperture refractive optics, allowing facilities (like PETRA IV or future upgrades) to fully exploit the increased lateral coherence and brightness from ultra-low-emittance storage rings.
  • X-ray Free-Electron Lasers (XFELs): Diamond phase plates offer high radiation resistance and thermal stability, making them suitable for wavefront conditioning and focusing ultra-intense XFEL pulses.
  • Custom Optical Element Manufacturing: Validates advanced manufacturing techniques (femtosecond ablation and two-photon polymerization) for producing complex, non-parabolic refractive X-ray optics, opening avenues for correcting other types of aberrations (e.g., those found in X-ray mirrors).
  • Beam Transport and Conditioning: Improves the overall quality and Strehl ratio of focused X-ray beams, enhancing experimental throughput and signal-to-noise ratio in demanding experiments.
View Original Abstract

Modern subtractive and additive manufacturing techniques present new avenues for X-ray optics with complex shapes and patterns. Refractive phase plates acting as glasses for X-ray optics have been fabricated, and spherical aberration in refractive X-ray lenses made from beryllium has been successfully corrected. A diamond phase plate made by femtosecond laser ablation was found to improve the Strehl ratio of a lens stack with a numerical aperture (NA) of 0.88 × 10 −3 at 8.2 keV from 0.1 to 0.7. A polymer phase plate made by additive printing achieved an increase in the Strehl ratio of a lens stack at 35 keV with NA of 0.18 × 10 −3 from 0.15 to 0.89, demonstrating diffraction-limited nanofocusing at high X-ray energies.