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Robust Geometries for Second-Harmonic-Generation in Microrings Exhibiting a 4-Bar Symmetry

MetadataDetails
Publication Date2020-12-17
JournalApplied Sciences
AuthorsPierre Guillemé, Chiara Vecchi, Claudio Castellan, Stefano Signorini, Mher Ghulinyan
InstitutionsFondazione Bruno Kessler, National Institute of Optics
AnalysisFull AI Review Included

This analysis focuses on designing robust silicon microring resonator geometries for efficient Second-Harmonic Generation (SHG), specifically addressing limitations imposed by typical fabrication tolerances in integrated photonics.

  • Core Value Proposition: The study identifies specific microring geometries that exhibit SHG efficiency nearly independent of small variations in waveguide thickness and radius, thereby relaxing stringent fabrication requirements.
  • Mechanism: SHG is achieved by exploiting the intrinsic 4-bar symmetry of the silicon lattice, enabling a quasi-phase matching condition (mSH = 2mf + 2).
  • Robust Geometry Identified: The optimal robust geometry occurs where the internal radius (Rin) as a function of thickness (e) exhibits a flat maximum (e ≈ 330 nm, Rin ≈ 60.755 ”m).
  • Tolerance Improvement: This robust design maintains high efficiency (η ≄ 10-4) across a thickness variation range of 16 nm, a significant improvement over non-optimized geometries which tolerate only about 1 nm of variation.
  • Performance: Theoretical conversion efficiencies up to 1.7 x 10-4 were calculated for 1 mW pump power, using a pump wavelength (λf) greater than 2.2 ”m to avoid Two-Photon Absorption (TPA).
  • Transferability: The methodology, which relies on analyzing modal confinement dependence on geometry, can be easily transferred to other material systems (like GaAs or AlN) that also exhibit 4-bar symmetry.
  • Application Focus: The resulting devices are ideal for integrated quadratic frequency comb sources and on-chip frequency conversion for metrology and sensing applications.
ParameterValueUnitContext
Material SystemStrained Silicon (Si)N/ACore material, assumed X(2)zxy ≠ 0
Cladding MaterialSi3N4N/ACladding layer thickness: 140 nm
Waveguide Width (w)800nmWidth used for robustness analysis
Optimal Robust Thickness (e)330nmThickness yielding maximum tolerance
Optimal Robust Internal Radius (Rin)60.755”mRadius corresponding to optimal thickness
Pump Wavelength (λf)> 2.2”mMinimum wavelength to prevent Two-Photon Absorption (TPA)
Second Harmonic Wavelength (λSH)~1.15”mGenerated frequency
Maximum Conversion Efficiency (ηmax)1.7 x 10-4N/ACalculated for Pin = 1 mW, Q = 104
Robust Thickness Tolerance Range16nmRange where η ≄ 10-4 (around e = 330 nm)
Non-Robust Thickness Tolerance Range1nmRange where η ≄ 10-4 (around e = 440 nm)
Assumed Second-Order Susceptibility (X(2)zxy)1pm/VValue used for efficiency modeling
Assumed Quality Factor (Q)104N/AUsed for both intrinsic (Qint) and coupling (Qcpl)
Pump Power (Pin)1mWUsed for efficiency calculations

The design and optimization relied on Finite Element Method (FEM) simulations combined with experimental material data to ensure both energy and angular momentum conservation for SHG.

  1. Electromagnetic Simulation: Finite Element Method (FEM) simulations using COMSOL Multiphysics were employed to determine the resonant modes and effective indices of the microring structure.
  2. Material Dispersion Modeling: Refractive index dispersions for Si, SiO2, and Si3N4 were derived from Sellmeier fits of experimental ellipsometry measurements performed at the fabrication facility (Fondazione Bruno Kessler).
  3. Mode Selection and Conservation:
    • Energy Conservation: Enforced λf = 2λSH.
    • Angular Momentum Conservation (QPM): Enforced mSH = 2mf + 2, utilizing the 4-bar symmetry of the Si lattice.
    • Polarization/Mode Order: Focused on a Hz-polarized fundamental mode (pf = 1) generating an Ez-polarized SH mode (pSH = 3).
  4. Geometry Iteration: For fixed width (w) and thickness (e), the internal radius (Rin) was iteratively adjusted until the SHG phase-matching conditions were satisfied.
  5. Efficiency Calculation: Conversion efficiency (η) was calculated using the undepleted pump approximation, incorporating the field overlap integral (K) between the fundamental and SH modes, and assuming critical coupling (Q = 104).
  6. Robustness Analysis: The relationship between the required radius and thickness (Rin = f(e)) for SHG was plotted. The geometry corresponding to the flat maximum of this curve (e ≈ 330 nm) was selected as the robust design, as small thickness variations near this point require minimal radius adjustment, minimizing efficiency degradation.

The development of robust, integrated SHG devices in silicon is critical for advancing integrated nonlinear photonics, targeting applications where stability and mass manufacturability are essential.

  • Integrated Frequency Combs: Enables the creation of integrated quadratic frequency comb sources (OFCs) that utilize second-order nonlinearities to achieve octave-spanning spectra, crucial for high-precision measurements.
  • Metrology and Sensing: The stability and precision offered by integrated OFCs are fundamental for advanced on-chip metrology and high-sensitivity optical sensing systems.
  • Radio-on-Fiber (RoF): Frequency conversion capabilities are essential for high-speed data transmission and signal processing in radio-on-fiber networks.
  • Material Characterization: The SHG measurement technique serves as a tool to scout and characterize new materials suitable for quadratic OFCs by measuring their effective second-order nonlinear dielectric susceptibility (X(2)).
  • Integrated Nonlinear Optics: General on-chip frequency conversion, such as converting telecom wavelengths (2.3 ”m) to visible wavelengths (1.15 ”m), for use in compact photonic circuits.
View Original Abstract

Microring resonators made of materials with a zinc-blend or diamond lattice allow exploiting their 4-bar symmetry to achieve quasi-phase matching condition for second-order optical nonlinearities. However, fabrication tolerances impose severe limits on the quasi-phase matching condition, which in turn degrades the generation efficiency. Here, we present a method to mitigate these limitations. As an example, we studied the geometry and the pump wavelength conditions to induce the second-harmonic generation in silicon-based microrings with a second-order susceptibility χzxy(2)≠0. We found the best compromises between performances and experimental requirements, and we unveil a strategy to minimize the impacts of fabrication defects. The method can be easily transferred to other material systems.

  1. 2000 - Direct Link between Microwave and Optical Frequencies with a 300 THz Femtosecond Laser Comb [Crossref]
  2. 2015 - Silicon-chip mid-infrared frequency comb generation [Crossref]
  3. 1999 - Broadband optical frequency comb generation with a phase-modulated parametric oscillator [Crossref]
  4. 2014 - Integrated high quality factor lithium niobate microdisk resonators [Crossref]
  5. 2016 - Second-harmonic generation in aluminum nitride microrings with 2500%/W conversion efficiency [Crossref]