Sensitive Elements of High Temperature Pressure Sensors Formed from a Doped Polycrystalline Diamond
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2021-05-01 |
| Journal | Materials science forum |
| Authors | E. A. Vysotina, Š . Š. Š ŠøŠ·Š°Ń Š°Š½Š¾Š², S. K. Sigalaev, N. I. Polushin, V. A. Shokorov |
| Institutions | National University of Science and Technology |
| Citations | 1 |
Abstract
Section titled āAbstractāThe need to create highly accurate pressure sensors that capable operate under extreme conditions in aviation, rocket and space equipment increases and becomes more relevant. The unique properties of diamond make it a promising material for microelectronic sensors. Sensitive elements of pressure sensors were developed where a resilient element is formed from silicon but resistance strain gauges are formed from a boron-doped polycrystalline diamond film.