The BAW and SAW coupling analysis of patterned piezoelectric films as inter-digital transducers on diamond substrates using delta-function model
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2021-08-01 |
| Journal | AIP Advances |
| Authors | Bowei Xie, Fazhu Ding, Hongjing Shang, Daxing Huang, T. G. Li |
| Institutions | National Laboratory for Superconductivity, Institute of Electrical Engineering |
Abstract
Section titled āAbstractāPatterned piezoelectric films as inter-digital transducer (PP-IDT) structures on diamond substrates have been attracting extensive attention due to the increased working frequency, electromechanical coupling, and quality factor of piezoelectric devices. In this study, by conceiving every single patterned piezoelectric IDT bar as the longitudinal bulk acoustic wave (BAW) vibrating source, we study how the BAW excites and couples with the surface acoustic wave (SAW) on the surface of diamond substrates and resonates simultaneously. The classic delta-function model of the SAW and electric impedance theory of the film bulk acoustic resonator were innovatively combined to develop this conception. Resonating frequency and corresponding piezoelectric IDT thickness were calculated using MATLAB software based on the developed delta-function model. The resonance results coincided well with finite element method simulations, validating this conception and the developed delta-function model for PP-IDT structures.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
Section titled āReferencesā- 2017 - Advanced Piezoelectric Materials
- 2007 - Surface Acoustic Wave Filters With Application to Electronic Communications and Signal Processing