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Spin Polarization and Magnetic Moment in Silicon Carbide Grown by the Method of Coordinated Substitution of Atoms

MetadataDetails
Publication Date2021-09-26
JournalMaterials
AuthorsС. А. Кукушкін, А. В. Осипов
InstitutionsInstitute of Problems of Mechanical Engineering
Citations10
AnalysisFull AI Review Included

This research introduces a novel method (MCSA) for creating stable, spin-polarized silicon carbide (3C-SiC) layers, highly relevant for spintronics and quantum technology.

  • Core Innovation: Silicon vacancies (VSi) are intentionally generated in the Si substrate (low formation energy, ~3.3 eV) via high-temperature annealing, and then transferred into the growing 3C-SiC layer during the MCSA conversion process.
  • Stable Spin Defect: The VSi stabilizes into a C4V center (an almost flat cluster of four C atoms with an underlying void), which is structurally and functionally analogous to the NV center in diamond.
  • Magnetic Properties: The C4V center possesses a stable solid-state spin and a magnetic moment of 1.0 Bohr magneton (µB).
  • Spin Polarization: Depending on the defect concentration (nC4V), the material transitions from a nonmagnetic semiconductor to a half-metallic ferromagnet (100% spin polarization at nC4V ≈ 4.2%) or a magnetic metal (84% spin polarization).
  • Process Control: The concentration of C4V centers can be controlled by adjusting the time and temperature of the preliminary vacuum annealing of the Si substrate.
  • Integration Advantage: The resulting 3C-SiC layers are epitaxial and compatible with standard silicon microelectronics, facilitating scaling and integration of spin-based devices.
ParameterValueUnitContext
SiC Polytype Grown3C-SiC(111)N/ACubic polytype, epitaxial growth.
Substrate UsedSi(111) doped with BN/AP-type silicon substrate.
Si Vacancy Formation Energy (Si)~3.3eVEnergy barrier in Si (low).
Si Vacancy Formation Energy (SiC)~8eVEnergy barrier in SiC (high).
Si Pre-Annealing Temperature1350-1380°CStep for VSi creation in Si.
Si Pre-Annealing Time (ta)1-40minControls VSi concentration.
SiC Synthesis Temperature (Ts)~1350°CMCSA growth temperature.
CO Pressure (PCO)80-200PaMCSA synthesis parameter.
Epitaxial Layer Thickness (HSiC)0.1-1µmTypical thickness range.
C4V Magnetic Moment (Stable)1.0µBBohr magneton (DFT calculation).
C4V Magnetic Moment (Metastable VSi)0.8µBInitial state VSi.
VSi to C4V Transition Barrier3.33eVEnergy barrier height (nonmagnetic transition state).
C-C Bond Wavenumber (C4V)952cm-1Observed Raman shift for stable VSi defect.
Spin Polarization (nC4V ≈ 4.2%)100%Half-metallic ferromagnet state (System II).
Spin Polarization (nC4V ≈ 6.3%)84%Ferromagnetic metal state (System III).
SiC Cubic Cell Volume83A3Volume after conversion from Si.
Si Cubic Cell Volume (Initial)160A3Volume before conversion (twofold decrease).

The process relies on the Method of Coordinated Substitution of Atoms (MCSA) combined with a critical pre-annealing step to manage vacancy concentration.

  1. Substrate Preparation: 3-inch Si(111) substrates (p-type, B-doped) are chemically purified using NH4OH and NH4F to remove oxides and passivate the surface with hydrogen.
  2. Vacancy Pre-Creation: Substrates are annealed in a vacuum at T ~1350-1380 °C for 1 to 40 minutes. This high temperature induces the formation of silicon vacancies (VSi) in the Si surface layer, exploiting the low VSi formation energy in Si (~3.3 eV).
  3. SiC Synthesis (MCSA): Carbon monoxide (CO) gas is introduced into the furnace. The Si substrate is converted into 3C-SiC(111) via the chemical reaction: 2Si (crystal) + CO (gas) = SiC (crystal) + SiO (gas) ↑.
    • Parameters: T ~1350 °C, PCO = 80-200 Pa, synthesis time (ts) = 10-20 min.
  4. Vacancy Transition and Stabilization: During the conversion, a portion of the pre-created VSi transit into the SiC layer. Thermal fluctuations at T > 1200 °C force an adjacent C atom to jump into the VSi site, stabilizing the defect into the magnetic C4V center (1.0 µB).
  5. Structural Characterization: Layers were analyzed using X-ray Diffraction (XRD) and Reflected High-Energy Electron Diffraction (RHEED) to confirm epitaxial quality (main 3C-SiC(111) peak half-width of 6 arcmin).
  6. Defect Confirmation: Raman Spectroscopy (RS) detected the stable C4V center via an additional peak at 952 cm-1, corresponding to the C-C bond vibrations within the cluster.
  7. Modeling of Spin Properties: Density Functional Theory (DFT) using Medea-VASP software (PBE and MBJLDA meta-GGA functionals) was employed to calculate the magnetic moment, band structure, and spin polarization of the SiC containing C4V centers.

The ability to engineer intrinsic ferromagnetism and high spin polarization in SiC layers makes this technology highly valuable for next-generation electronic and quantum devices.

  • Spintronics:
    • Development of highly efficient spin injectors and detectors utilizing the 100% spin polarization achieved in the half-metallic ferromagnet state (nC4V ≈ 4.2%).
    • Creation of spin-based logic and memory devices integrated directly onto silicon platforms.
  • Quantum Computing and Sensing:
    • The C4V center serves as a solid-state spin qubit candidate, offering an alternative to NV centers in diamond, but with superior compatibility for integration into Si microelectronics.
    • Use in quantum sensors based on the robust solid-state spin properties of the C4V defect.
  • Magnetic Materials Engineering:
    • Fabrication of thin-film magnetic materials where the magnetic properties are controlled by defect concentration rather than traditional doping or alloying.
  • Integrated Microelectronics:
    • Enabling the monolithic integration of magnetic and spin-based functionalities directly onto standard Si(111) wafers, reducing complexity and cost for advanced device manufacturing.
View Original Abstract

In the present work, a new method for obtaining silicon carbide of the cubic polytype 3C-SiC with silicon vacancies in a stable state is proposed theoretically and implemented experimentally. The idea of the method is that the silicon vacancies are first created by high-temperature annealing in a silicon substrate Si(111) doped with boron B, and only then is this silicon converted into 3C-SiC(111), due to a chemical reaction with carbon monoxide CO. A part of the silicon vacancies that have bypassed “chemical selection” during this transformation get into the SiC. As the process of SiC synthesis proceeds at temperatures of ~1350 °C, thermal fluctuations in the SiC force the carbon atom C adjacent to the vacancy to jump to its place. In this case, an almost flat cluster of four C atoms and an additional void right under it are formed. This stable state of the vacancy, by analogy with NV centers in diamond, is designated as a C4V center. The C4V centers in the grown 3C-SiC were detected experimentally by Raman spectroscopy and spectroscopic ellipsometry. Calculations performed by methods of density-functional theory have revealed that the C4V centers have a magnetic moment equal to the Bohr magneton μB and lead to spin polarization in the SiC if the concentration of C4V centers is sufficiently high.

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