Structural Analysis of DLC Thin Film Using X-Ray Reflectivity and Raman Spectroscopy Techniques
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2022-01-28 |
| Journal | Key engineering materials |
| Authors | Khairul Aizat Nadzari, Muhammad Firdaus Omar, Nor Shahira Md Rudin, Abd Khamim Ismail |
| Institutions | University of Technology Malaysia |
| Citations | 1 |
Abstract
Section titled āAbstractāThe characteristics of sputtered amorphous diamond-like carbon-containing copper (DLC: Cu films) films deposited on Si (100) substrates and Si (111) in argon gas-filled chamber using carbon target under different substrates deposition time, and RF power. The samples were deposited by RF magnetron sputtering and analyzed using Raman spectroscopy and X-ray reflectivity (XRR) methods. Different parameters of depositions were used to study the structure, thickness, roughness, and density of the samples. The Cu preliminary layer act as a catalyst to growth the DLC thin-film analyzed using XRR analysis to measure thickness, roughness, and density of the thin films. The film structures of the samples were analyzed using Raman spectroscopy with a 532nm laser source. Gaussian peak shapes were used in Raman spectrum fitting to analyzed to measure the D band and G band for both samples. The Films thickness, roughness, and mass density were studied by XRR techniques using XRD to acquire the multilayer structure of thin films grown by magnetron sputtering.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
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