Novel Source Development for Focused Ion Beam Implantation and Irradiation [Slides]
At a Glance
Section titled âAt a Glanceâ| Metadata | Details |
|---|---|
| Publication Date | 2022-11-06 |
| Authors | Edward S. Bielejec, Michael Titze, Aaron M. Katzenmeyer, Alex Belianinov, Barney L. Doyle |
| Institutions | Sandia National Laboratories California |
Abstract
Section titled âAbstractâWe have demonstrated focused ion implantation for fabrication of single atom devices and nanofabrication. This is a viable solution for prototyping - fast and easy! There is on-going work in diamond, SiN, SiC, hBN, GaN, AlGan, etc. A new liquid metal alloy ion source development is on-going. There is a pathway towards deterministic defect centers in wide bandgap materials using FIB implantation.