Diamond FET and MEMS Dvivices
At a Glance
Section titled âAt a Glanceâ| Metadata | Details |
|---|---|
| Publication Date | 2023-07-23 |
| Authors | Yasuo Koide, Jiangwei Liu, Meiyong Liao, Masataka Imura |
| Institutions | National Institute for Materials Science |
Abstract
Section titled âAbstractâDiamond FET and MEMS devices are developed using a high-quality single crystal epilayer grown by a microwave plasma chemical deposition technique. A hydrogen-terminated diamond surface, a metal/diamond contact interface, and a smart cut technique are a key role to obtain excellent device performance.