Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products
At a Glance
Section titled “At a Glance”| Metadata | Details |
|---|---|
| Publication Date | 2024-01-18 |
| Journal | Applied Physics Express |
| Authors | Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi |
| Institutions | National Institute for Materials Science, Tohoku University |
| Citations | 4 |
Abstract
Section titled “Abstract”Abstract MEMS resonant sensing devices require both HF ( f ) and low dissipation or high quality factor ( Q ) to ensure high sensitivity and high speed. In this study, we investigate the resonance properties and energy loss in the first three resonance modes, resulting in a significant increase in f‧Q product at higher orders. The third order resonance exhibits an approximately 15-fold increase in f‧Q product, while the Q factor remains nearly constant. Consequently, we achieved an ultrahigh f‧Q product exceeding 10 12 Hz by higher-order resonances in single-crystal diamond cantilevers.