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6CCVD Research

Probe beam deflection technique with liquid immersion for fast mapping of thermal conductance

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2024-01-22
JournalApplied Physics Letters
AuthorsJinchi Sun, Zhe Cheng, Jianbo Liang, Naoteru Shigekawa, Keisuke Kawamura
InstitutionsPeking University, University of Illinois Urbana-Champaign
Citations6

Abstract

Section titled ā€œAbstractā€

Frequency-domain probe beam deflection (FD-PBD) is an experimental technique for measuring thermal properties that combines heating by a modulated pump laser and measurement of the temperature field via thermoelastic displacement of the sample surface. In the conventional implementation of FD-PBD, the data are mostly sensitive to the in-plane thermal diffusivity. We describe an extension of FD-PBD that introduces sensitivity to through-plane thermal conductance by immersing the sample in a dielectric liquid and measuring the beam deflection created by the temperature field of the liquid. We demonstrate the accuracy of the method by measuring (1) the thermal conductivity of a 310 nm thick thermally grown oxide on Si, (2) the thermal boundary conductance of bonded interface between a 3C-SiC film and a single crystal diamond substrate, and (3) the thermal conductivities of several bulk materials. We map the thermal boundary conductance of a 3C-SiC/diamond interface with a precision of 1% using a lock-in time constant of 3 ms and dwell time of 15 ms. The spatial resolution and maximum probing depth are proportional to the radius of the focused laser beams and can be varied over the range of 1-20 Ī¼m and 4-80 Ī¼m, respectively, by varying the 1/e2 intensity radius of the focused laser beams from 2 to 40 Ī¼m. FD-PBD with liquid immersion thus enables fast mapping of spatial variations in thermal boundary conductance of deeply buried interfaces.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2004 - Thermal conductivity imaging at micrometre-scale resolution for combinatorial studies of materials [Crossref]
  2. 2008 - Thermal conductivity mapping of pyrolytic carbon and silicon carbide coatings on simulated fuel particles by time-domain thermoreflectance [Crossref]
  3. 2013 - Thermal property microscopy with frequency domain thermoreflectance [Crossref]
  4. 2018 - Direct visualization of thermal conductivity suppression due to enhanced phonon scattering near individual grain boundaries [Crossref]
  5. 2018 - International Heat Transfer Conference Digital Library
  6. 2019 - Spatially resolved thermoreflectance techniques for thermal conductivity measurements from the nanoscale to the mesoscale [Crossref]
  7. 2020 - High spatial resolution thermal conductivity mapping of SiC/SiC composites [Crossref]
  8. 2019 - Spatial mapping of thermal boundary conductance at metal-molybdenum diselenide interfaces [Crossref]
  9. 2021 - Thermal visualization of buried interfaces enabled by ratio signal and steady-state heating of time-domain thermoreflectance [Crossref]
  10. 2014 - Thermal conductance imaging of graphene contacts [Crossref]

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