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Structure and properties of Si 3 N 4 -based diamond/MoS 2 -TiN composite films

MetadataDetails
Publication Date2024-01-23
JournalFullerenes Nanotubes and Carbon Nanostructures
AuthorsFeng Lu, Ting Zhang, Xu Bai, Yuhou Wu, Tongxiang Zheng
InstitutionsShenyang University of Technology, Shenyang Jianzhu University
Citations2

This study aims to optimize the performance of silicon nitride (Si3N4) ceramic bearings in high-temperature and heavy-duty environments and to address the issues of insufficient lubrication and heat generation in vacuum environments. To this end, we prepared diamond and MoS2-TiN composite films on silicon nitride ceramic substrates using a hot-wire chemical vapor deposition system and a physical vapor deposition system. The experimental results show that increasing the deposition time of the diamond films can significantly improve their hardness and elastic modulus, enhance the bonding of the films with the substrate, reduce the friction coefficient, and increase the thermal conductivity. Furthermore, by appropriately reducing the sputtering power of the MoS2 film, we can effectively minimize damage to the diamond film and further enhance the overall performance of the composite film. This study offers valuable insights for addressing lubrication and heat dissipation challenges in vacuum environments.