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6CCVD Research

A Systematic Study of the Factors Affecting the Surface Quality of Chemically Vapor-Deposited Diamond during Chemical and Mechanical Polishing

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2024-03-28
JournalMicromachines
AuthorsZewei Yuan, Zhihui Cheng, Yusen Feng
InstitutionsShenyang University of Technology
Citations5
AnalysisFull AI Review Included

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View Original Abstract

Diamond surfaces must be of high quality for potential use in semiconductors, optical windows, and heat conductivity applications. However, due to the materialā€™s exceptional hardness and chemical stability, it can be difficult to obtain a smooth surface on diamond. This study examines the parameters that can potentially influence the surface quality of chemically vapor-deposited (CVD) diamonds during the chemical and mechanical polishing (CMP) process. Analysis and experimental findings show that the surface quality of polished CVD diamonds is significantly influenced by the crystal structure and the growth quality of the diamond. In particular, when the surface roughness is below Ra 20 nm, the pores and grain boundaries on CVD diamond obstruct surface roughness reduction during mechanical polishing. To obtain a smooth polished surface, careful consideration of the size of diamond abrasives and polishing methods is also a prerequisite. Chemical mechanical polishing is a novel method to achieve a surface quality with roughness below Ra 3 nm, as in this method, the anisotropy of the CVD diamond allows the uneven steps to be efficiently erased. However, the chemical actions of polishing slurry should be controlled to prevent the formation of chemical etching pits.

Tech Support

Section titled ā€œTech Supportā€

Original Source

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References

Section titled ā€œReferencesā€
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  4. 1994 - Properties of diamond for window and dome applications [Crossref]
  5. 2012 - The properties and applications of nanodiamonds [Crossref]
  6. 1998 - Infrared properties of chemical-vapor deposition polycrystalline diamond windows [Crossref]
  7. 1995 - Frontiers in infrared window and dome materials [Crossref]
  8. 2003 - Diamond-based surface acoustic wave devices [Crossref]

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