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Modulation of Diamond PN Junction Diode with Double-Layered n-Type Diamond by Using TCAD Simulation

MetadataDetails
Publication Date2024-04-28
JournalElectronics
AuthorsCaoyuan Mu, Genzhuang Li, Xianyi Lv, Qiliang Wang, Hongdong Li
InstitutionsJilin University
Citations1
AnalysisFull AI Review Included

This study proposes and validates, via TCAD simulation, a novel double-layered n-type diamond structure (D-PND) designed to function as a highly effective Junction Termination Extension (JTE) for vertical diamond PN junction diodes.

  • Core Achievement: The D-PND structure successfully modulates the electric field distribution, achieving a superior balance between breakdown voltage (Vbd) and on-resistance (Ron) compared to conventional single-layer (S-PND) designs.
  • Performance Metric: The optimized D-PND achieved a peak Baliga’s Figure of Merit (BFOM = Vbd2 / Ron) of 0.42 GW/cm2, a significant increase from the baseline S-PND value of 0.035 GW/cm2.
  • Optimal Parameters: The best performance was obtained with a Vbd of 1450 V and an Ron of 5.08 mΩ·cm2, simulated at an operating temperature of 550 K.
  • Structural Design: The JTE consists of an n- diamond layer (100 nm thick, 5 x 1017 cm-3) and an n+ diamond layer (50 nm thick, 1 x 1018 cm-3), separated by an optimal distance (S1) of 1 ”m.
  • Mechanism: The double-layer structure generates three balanced electric field peaks (at the electrode edge, n+-edge, and n--edge), effectively alleviating electric field crowding and preventing premature breakdown.
  • Implication: These results provide critical design guidelines for realizing high-power, high-efficiency vertical diamond power electronics.

The following specifications represent the optimized parameters and simulated performance metrics for the Double-Layered PND (D-PND) structure, unless otherwise noted.

ParameterValueUnitContext
Peak Baliga’s Figure of Merit (BFOM)0.42GW/cm2Optimized D-PND (S1 = 1 ”m)
Breakdown Voltage (Vbd)1450VOptimized D-PND (Max BFOM)
On-Resistance (Ron)5.08mΩ·cm2Optimized D-PND (Max BFOM)
Forward Turn-On Voltage (Von)5.7VTypical S-PND performance
Simulation Temperature (T)550KLattice temperature used for dopant activation
Critical Electric Field (Ec)6MV/cmValue used for diamond impact ionization model
p- Drift Layer Thickness4”mHole concentration: 1 x 1016 cm-3
p+ Substrate Thickness1”mHole concentration: 1 x 1019 cm-3
n- Layer Thickness (D1)100nmElectron concentration: 5 x 1017 cm-3
n+ Layer Thickness (D2)50nmElectron concentration: 1 x 1018 cm-3
JTE Separation Distance (S1)1”mDistance between n+ and n- layers (Optimized)
Electron Lifetime (τn)2 x 10-9sUsed in Shockley-Read-Hall (SRH) model
Hole Lifetime (τp)2 x 10-9sUsed in Shockley-Read-Hall (SRH) model

The study utilized Technology Computer-Aided Design (TCAD) simulation to model and optimize the vertical diamond PND structures.

  1. Simulation Environment: Silvaco TCAD software (Version 5.0.10.R) was used to perform 2D device simulations, focusing on forward conduction and reverse breakdown characteristics.
  2. Operating Temperature: A lattice temperature of 550 K was selected for all simulations. This temperature is crucial because it enhances the activation of dopants in diamond, which typically have large activation energies, thereby reducing device resistance.
  3. Physical Models Implemented:
    • Recombination: Shockley-Read-Hall (SRH) Recombination and Auger Recombination models were included to accurately describe carrier dynamics. Electron and hole lifetimes (τn, τp) were set to 2 x 10-9 s.
    • Mobility: The Low-Field Mobility model was adopted, incorporating temperature dependence. Mobility values at 300 K were specified for p-type (”p = 200 cm2/Vs) and n-type (”n = 500 cm2/Vs) diamond.
    • Doping: The incomplete ionization model was used to account for the temperature-dependent ionization of dopants.
    • Breakdown: Impact ionization was modeled using a critical electric field of 6 MV/cm for diamond.
  4. Optimization Strategy (S-PND): Initial simulations focused on the single-layer structure (S-PND) to determine the sensitivity of performance to cathode size (S = 0 to 3 ”m), n-type layer thickness (D = 100 to 200 nm), and doping concentration (1 x 1017 to 1 x 1018 cm-3).
  5. Optimization Strategy (D-PND): The double-layer structure (n+/n-) was optimized by systematically varying:
    • The relative distance (S1) between the n+ and n- layers (0 to 1.5 ”m).
    • The doping concentrations of the n+ and n- layers.
    • The individual thicknesses (D1 and D2) while maintaining a fixed total JTE depth (150 nm).

The successful optimization of the diamond PN junction diode structure, achieving high Vbd and low Ron, positions this technology for use in demanding power electronics sectors.

  • High-Voltage Power Conversion: Essential for utility-scale power grids, HVDC transmission systems, and industrial motor drives, requiring devices capable of blocking >1 kV.
  • Electric Vehicles (EVs) and Hybrid Systems: Used in high-efficiency traction inverters and charging infrastructure where minimizing power loss (low Ron) and maximizing reliability (high Vbd) are paramount.
  • Aerospace and Defense: Applications requiring robust, high-power density electronics that can operate reliably under extreme thermal conditions, leveraging diamond’s superior thermal conductivity.
  • High-Temperature Electronics: Suitable for downhole drilling, geothermal energy systems, or engine control units where ambient temperatures exceed the limits of silicon or SiC devices (operating capability confirmed at 550 K).
  • Pulsed Power Systems: Diamond’s high critical electric field (6 MV/cm) makes it ideal for fast, high-power switching in specialized pulsed power applications.
View Original Abstract

This study proposed a novel double-layer junction termination structure for vertical diamond-based PN junction diodes (PND). The effects of the geometry and doping concentration of the junction termination structure on the PNDs’ electrical properties are investigated using Silvaco TCAD software (Version 5.0.10.R). It demonstrates that the electric performances of PND with a single n-type diamond layer are sensitive to the doping concentration and electrode location of the n-type diamond. To further suppress the electric field crowding and obtain a better balance between breakdown voltage and on-resistance, a double-layer junction termination structure is introduced and evaluated, yielding significantly improved electronic performances. Those results provide some useful thoughts for the design of vertical diamond PND devices.

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