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Overview of Diamond Semiconductor Development and Research Directions

MetadataDetails
Publication Date2025-05-06
JournalApplied and Computational Engineering
AuthorsYuewei Sun
InstitutionsHuazhong University of Science and Technology
AnalysisFull AI Review Included

This paper provides an overview of diamond semiconductor technology, highlighting its superior physical properties and outlining the current state of preparation and doping methods for high-performance electronic devices.

  • Superior Material Properties: Diamond is identified as the most promising wide-bandgap (WBG) material (5.45 eV), possessing the highest thermal conductivity (20 Wcm-1K-1) and breakdown field (10 MV/cm), significantly exceeding GaN and SiC.
  • Synthesis Methods: Mainstream artificial synthesis relies on High Pressure High Temperature (HPHT) and Chemical Vapor Deposition (CVD), with Microwave Plasma CVD (MPCVD) being the most mature method for producing high-purity films.
  • Doping Bottleneck: P-type doping (Boron) is mature. However, N-type doping (Phosphorus/Nitrogen) remains the primary technical barrier, characterized by low carrier concentration and high defect density, hindering full device commercialization.
  • Device Development: Current research focuses on high-power devices like Schottky diodes (often using field-plate structures to mitigate N-type immaturity) and hydrogen-terminated Metal-Oxide-Semiconductor (MOS) tubes.
  • Optoelectronic Potential: The ultra-wide forbidden band enables the development of solar-blind UV detectors capable of sensing photons with energies greater than 5.5 eV.
  • Industrialization Challenges: High production costs, slow growth rates, difficulty in preparing large single crystals, and complex doping processes are the main obstacles to commercial scale-up.
ParameterValueUnitContext
Forbidden Bandwidth5.45eVHighest among major WBG semiconductors
Breakdown Electric Field10MV/cmMaximum voltage handling capability
Thermal Conductivity20Wcm-1K-1Superior heat dissipation capability
Electron Mobility4500cm2V-1s-1High-frequency switching performance
Hole Mobility3800cm2V-1s-1High-frequency switching performance
Relative Permittivity5.5N/ALow dielectric constant
Electron Saturation Velocity2.7 x 107cm/sHigh-speed operation
Phosphorus Doping DepthApprox. 700nmAchieved via HPHT thermal diffusion
N-type Activation Energy102meVPhosphorus-doped diamond
N-type Resistivity2Ω·cmPhosphorus-doped diamond (Room Temperature)
Heteroepitaxy Dislocation Density106 to 108cm-2Challenge in growing large single crystals on foreign substrates
UV Detection Threshold> 5.5eVPhoton energy required for detection

The preparation of diamond semiconductors involves two primary synthesis routes and specialized doping techniques:

  1. High Pressure High Temperature (HPHT) Synthesis:

    • Mechanism: Physical transformation method where diamond precipitates from a carbon source using a metal catalyst under extreme pressure and temperature.
    • Output: Efficient, large-quantity production, but the resulting crystals often have internal defects and variable morphology, limiting direct use in high-end semiconductor applications without further refinement.
  2. Chemical Vapor Deposition (CVD):

    • Mechanism: Chemical deposition of diamond film onto a substrate or single-crystal seed.
    • Most Mature Variant: Microwave Plasma Chemical Vapor Deposition (MPCVD).
    • Process: A gas mixture reacts under microwave action to form diamond structural units. This method yields high purity and low impurity defects, but the size of the resulting single crystal is often limited by seed crystal edge effects.
  3. P-type Doping (Boron):

    • Dopant: Boron (B).
    • Methods: Addition during HPHT synthesis; vapor deposition growth; high-temperature infiltration; or ion implantation.
    • Rationale: Boron’s small atomic radius and high solubility facilitate easy replacement of carbon atoms, making this the most mature doping technology.
  4. N-type Doping (Phosphorus and Nitrogen):

    • Dopants: Phosphorus (P) or Nitrogen (N).
    • Phosphorus Method: High-pressure thermal diffusion used to achieve deep doping (up to 700 nm) and low resistivity (2 Ω·cm).
    • Nitrogen Method: Nitrogen introduces vacancies that form defect centers (color centers), primarily utilized for optoelectronic applications due to improved luminescence efficiency.
  5. Surface Modification for Devices:

    • Hydrogen Termination: Used to modify the diamond surface properties, enabling P-type conductivity at room temperature, crucial for preparing devices like hydrogen-terminated diamond MOS tubes.

Diamond semiconductor technology is poised to impact several high-demand sectors due to its extreme physical and electronic properties.

  • High-Power Electronics:

    • Products: High-voltage diodes (pin tubes, Schottky barrier diodes) and MOS field-effect transistors.
    • Value Proposition: High breakdown voltage (10 MV/cm) and superior thermal management (20 Wcm-1K-1) enable smaller, more reliable power modules for electric vehicles, smart grids, and industrial motor control.
  • High-Frequency and Communications:

    • Industries: 5G/6G infrastructure, artificial intelligence (AI), and intelligent driving.
    • Value Proposition: High carrier mobility (4500 cm2V-1s-1) and saturation drift rate support ultra-fast switching and high-frequency signal processing, minimizing parasitic capacitance and heat issues.
  • Optoelectronics and Sensing:

    • Products: Solar-blind UV detectors (e.g., Au-electrode Si-based diamond detectors).
    • Value Proposition: The ultra-wide bandgap allows detection of high-energy photons (> 5.5 eV), crucial for specialized UV sensing applications.
  • High-Temperature Environments:

    • Value Proposition: Diamond’s stability and thermal properties allow electronic devices to operate reliably in extreme temperature conditions where silicon and even GaN/SiC may fail.
View Original Abstract

With the advancement of science and technology, traditional semiconductor materials can no longer meet the high frequency and high power demand. Diamond semiconductor has gradually become a research hotspot because of its excellent physical properties, such as high hardness and wide forbidden band. Through the literature review method, this paper discusses the crystal structure and physical properties of diamond semiconductor, such as high hardness, high thermal conductivity, wide bandwidth and other advantages. This paper also describes its preparation methods, including high temperature and high pressure synthesis and chemical vapor deposition, and discusses the current status of the application in the field of power electronics, optoelectronics, etc. The results reveal that the challenges faced by the doping process are complex, with high costs being a significant issue. However, with the development of technology and process optimization, diamond semiconductor is expected to become a hot spot in the research of high-frequency power.