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707 Study on the power generation device by super lattice structure DLC Films

MetadataDetails
Publication Date2015-01-01
JournalThe Proceedings of Ibaraki District Conference
AuthorsMasashi NAKAMURA, Takuya Hashimoto
InstitutionsIbaraki University

This paper presents an investigation of the thermoelectric performance of super lattice structure diamond-like carbon (DLC) Films deposited on glass substrates using unbalanced magnetron sputtering (UBMS). The respective thermoelectric performances of the super lattice structure DLC film and TiC single-layer film were evaluated and compared. The super lattice structure DLC films showed a Seebeck effect, and they had p-type semiconductor characteristic. The super lattice structure DLC than a titanium carbide (TiC) single layer is the Seebeck coefficient is increased. The superlattice structure DLC than a titanium carbide (TiC) single layer is the specific resistance is increased. Power factor (PF) of the superlattice of the DLC film was lower than the TiC single layer. Results show that the PF quality of superlattice structure DLC films was affected strongly by the magnitude of the specific resistance.