ED HIGH Q-FACTOR MICROCRY
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2015-01-01 |
| Authors | Daisuke Saito, Chen Yang, Amir Heidari, Hadi Najar, Liwei Lin |
Abstract
Section titled āAbstractāThis paper reports a 1.5 mm polycrystalline diamond Cylindrical Re gyroscope applications. The device i cylindrical shape using silicon on insul and deep reactive ion etching (DRIE flexibility of choosing different geomet for the resonator structure. A quality fac is measured at the 23 kHz 2 theta el modes, producing a ring-down time Annealing CRs at 700 Ā°C in a nitr improved Q from 75,000 to over 300, symmetric fabrication results in CRs frequency mismatch of 3 Hz (130 ppm) b degenerate wineglass modes without ap voltage.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal Sourceā- DOI: None