Investigation into the Minimum Feature Size for Reactive-Ion Etched (RIE) Micro and Nano-Scale Polycrystalline Diamond Mechanical Resonators
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2015-01-01 |
| Journal | Enlighten: Publications (The University of Glasgow) |
| Authors | Andrew William Mcglone, Oliver A. Williams, David A. J. Moran |
Abstract
Section titled āAbstractāOwing to its unique mechanical properties such as high acoustic velocity (18,024 m/s) [1] and high thermal conductivity (2100 W/mK) [2], diamond is an attractive candidate for use in micro-electro-mechanical systems (MEMS) devices and is implemented in numerous ways including micro-switching and mass detection. Reported is a process developed to fabricate and characterise cantilever shaped resonant structures of varying mass and dimension. Polycrystalline diamond samples with grain size sub-500 nm are produced by microwave plasma chemical vapour deposition on a silicon substrate in a 1% CH4/H2 environment. Samples are patterned using a Vistec VB6 UHR EWF electron beam lithography tool. Using an Al or HSQ mask, the patterned samples are etched in an RIE tool with an O2/Ar gas mixture returning an anisotropy of ~80Ė. The etched diamond structures are released from the silicon substrate by wet etching the sample in KOH. The mass of the structures are scaled down until mechanical failure is observed, demonstrated by degradation of frequency response and Q factor. The structures are actuated in air by mechanical force from either compressed air or a piezo clamp and resonant frequency and Q factor observed by means of a vibrometer. Experimental results are compared with simulations and sample specific values for Youngās modulus are reported.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal Sourceā- DOI: None