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The study of composition and surface electron structure of nitrogen-doped DLC film prepared by PIII-D

MetadataDetails
Publication Date2015-02-06
JournalFunctional Materials Letters
AuthorsHaiguang Li, Feng Wen, Changjiang Pan, Hongyan Ding, Nan Huang
InstitutionsHuaiyin Institute of Technology, Hainan University
Citations3

Nitrogen-doped diamond-like carbon (N-DLC) films were synthesized by plasma immersion ion implantation and deposition (PIII-D) at room temperature (RT). During the process of deposition, N 2 flow was changed from 0 to 10 sccm. Lifshitz-van der Waals/acid-base (LW-AB) approach was employed to study the surface electronic state of the films, X-ray photoelectron spectroscopic (XPS) and valence band spectra (VBS) were used to study chemical bonds and electron structure information inside the films. Bandgap of the films were calculated by the data from ultraviolet spectrophotometer. The results showed that synthesized films were n-type semiconductors and doping of nitrogen element will affect the accepted-electron capability of the film. The change tendency of the bandgap coincides with that of the ratio of acidic to alkaline component of the polar acid-alkali surface energy. There was much sp hybrid electronic state existed in the films, which mainly sp 2 C=C / C=N and sp 3 C-C / C-N bonds.