Fabrication of Microstructures Embedded in SC-CVD Diamond with a Focused Proton Microbeam
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2015-05-01 |
| Journal | Key engineering materials |
| Authors | Wataru Kada, Yuya Kambayashi, Kenta Miura, Ryota Saruya, Atsushi Kubota |
| Institutions | Japan Atomic Energy Agency, Gunma University |
Abstract
Section titled āAbstractāMicrostructure patterning in single-crystal chemical vapor deposition (SC-CVD) diamond films was investigated to establish a direct patterning procedure by using proton beam writing with a focused microbeam of protons. Test microstructural patterns on SC-CVD diamond with different total fluences from 0.5 to 10 pC/Ī¼m 2 were formed with a probe diameter of approximately 1 Ī¼m, a maximum scanning area of 800 Ć 800 Ī¼m, and a beam current of up to 100 pA. The most intensively irradiated pattern with beam fluence of 10 pC/Ī¼m 2 was visualized with both transmission and reflection optical microscopy. The other patterns created with lower beam fluences were characterized by the changes in reflective index and were visible only in the transmission microscopy images. The depth of patterns was precisely controlled by changing proton energies in range of 0.75-3 MeV. The structures in depth from 5 to 45 Ī¼m were successfully observed in optical microscope images.