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Improved thermal management of InP transistors in transferred‐substrate technology with diamond heat‐spreading layer

MetadataDetails
Publication Date2015-06-01
JournalElectronics Letters
AuthorsKsenia Nosaeva, Nils Weimann, Matthias Rudolph, W. John, Olaf Krueger
InstitutionsKirchhoff (Germany), Ferdinand-Braun-Institut
Citations28

A method to improve the thermal management of indium phosphide (InP) double‐hetero bipolar transistors (DHBTs) fabricated in a transferred‐substrate technology is presented. A vapour‐phase deposited diamond layer acting as a heat spreader is heterogeneously integrated into the vertical layer stack. It is observed that the diamond layer reduces the thermal resistance of a 0.8 × 5 µm 2 single emitter-finger HBT by roughly 75% down to 1.1 K/mW which is, to the authors’ knowledge, the best value reported thus far for InP HBTs of comparable size. It is also the first demonstration of heterogeneous integration of diamond into an InP HBT monolithic microwave integrated circuit.

  1. 2013 - Development of a via etch process through diamond and BCB for an advanced transferred‐substrate InP HBT process
  2. 2000 - A simple method for the thermal resistance measurement of AlGaAs/GaAs heterojunction bipolar transistors