High-Q/V Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2015-07-03 |
| Journal | Nano Letters |
| Authors | Behzad Khanaliloo, Matthew Mitchell, Aaron C. Hryciw, Paul E. Barclay |
| Institutions | University of Calgary, National Institute for Nanotechnology |
| Citations | 154 |
Abstract
Section titled āAbstractāOptical microcavities enhance light-matter interactions and are essential for many experiments in solid state quantum optics, optomechanics, and nonlinear optics. Single crystal diamond microcavities are particularly sought after for applications involving diamond quantum emitters, such as nitrogen vacancy centers, and for experiments that benefit from diamondās excellent optical and mechanical properties. Light-matter coupling rates in experiments involving microcavities typically scale with Q/V, where Q and V are the microcavity quality-factor and mode-volume, respectively. Here we demonstrate that microdisk whispering gallery mode cavities with high Q/V can be fabricated directly from bulk single crystal diamond. By using a quasi-isotropic oxygen plasma to etch along diamond crystal planes and undercut passivated diamond structures, we create monolithic diamond microdisks. Fiber taper based measurements show that these devices support TE- and TM-like optical modes with Q > 1.1 Ć 10(5) and V < 11(Ī»/n) (3) at a wavelength of 1.5 Ī¼m.