Nitrogen termination of single crystal (100) diamond surface by radio frequency N2 plasma process - An in-situ x-ray photoemission spectroscopy and secondary electron emission studies
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2015-09-14 |
| Journal | Applied Physics Letters |
| Authors | Maneesh Chandran, Michal Shasha, Shaul Michaelson, A. Hoffman |
| Institutions | Technion ā Israel Institute of Technology |
| Citations | 53 |
Abstract
Section titled āAbstractāIn this letter, we report the electronic and chemical properties of nitrogen terminated (N-terminated) single crystal (100) diamond surface, which is a promising candidate for shallow NVā centers. N-termination is realized by an indirect RF nitrogen plasma process without inducing a large density of surface defects. Thermal stability and electronic property of N-terminated diamond surface are systematically investigated under well-controlled conditions by in-situ x-ray photoelectron spectroscopy and secondary electron emission. An increase in the low energy cut-off of the secondary electron energy distribution curve (EDC), with respect to a bare diamond surface, indicates a positive electron affinity of the N-terminated diamond. Exposure to atomic hydrogen results in reorganization of N-terminated diamond to H-terminated diamond, which exhibited a negative electron affinity surface. The change in intensity and spectral features of the secondary electron EDC of the N-terminated diamond is discussed.