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6CCVD Research

HBAR as a high frequency high stress generator

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2015-10-01
AuthorsTanay A. Gosavi, E. R. MacQuarrie, Gregory D. Fuchs, Sunil A. Bhave
InstitutionsCornell University, Purdue University West Lafayette
Citations13

Abstract

Section titled ā€œAbstractā€

In this paper we report on High-Overtone Bulk Acoustic Resonator (HBAR) as high stress generator by measuring f-Q product of various tones and overtones from room temperature to 80 Kelvin. HBARs provide excellent acoustic isolation from anchor losses as the modes are confined within the high finesse acoustic cavity made from single crystal diamond or silicon carbide (SiC) substrates. Their high Q and linearity makes them robust transducers for generating up to 20MPa AC stress with small drive voltages at GHz frequencies which is instrumental in manipulating spin-defect qubits in these materials.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 1991 - Wave Motion in Elastic Solids
  2. 2009 - Effect of phonon interactions on limiting the f.Q product of micromechanical resonators

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