Microcrystalline diamond cylindrical resonators with quality-factor up to 0.5 million
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2016-02-01 |
| Journal | Applied Physics Letters |
| Authors | Daisuke Saito, Yang Chen, Amir Heidari, Hadi Najar, Liwei Lin |
| Institutions | University of California, Berkeley, University of California, Davis |
| Citations | 19 |
Abstract
Section titled āAbstractāWe demonstrate high quality-factor 1.5 mm diameter batch-fabricated microcrystalline diamond cylindrical resonators (CR) with quality-factors limited by thermoelastic damping (TED) and surface loss. Resonators were fabricated 2.6 and 5.3 Ī¼m thick in-situ boron-doped microcrystalline diamond films deposited using hot filament chemical vapor deposition. The quality-factor (Q) of as-fabricated CRās was found to increase with the resonator diameter and diamond thickness. Annealing the CRs at 700 Ā°C in a nitrogen atmosphere led to a three-fold increase in Q, a result we attribute to thinning of the diamond layer via reaction with residual O2 in the annealing furnace. Post-anneal Q exceeding 0.5 million (528 000) was measured at the 19 kHz elliptical wineglass modes, producing a ring-down time of 8.9 s. A model for Q versus diamond thickness and resonance frequency is developed including the effects of TED and surface loss. Measured quality factors are shown to agree with the predictions of this model.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
Section titled āReferencesā- 2004 - The CVD Diamond Booklet