Skip to content
6CCVD Research

Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2016-04-02
JournalSensors
AuthorsYanwei Guan, Shiqiao Gao, Haipeng Liu, Lei Jin, Shaohua Niu
InstitutionsBeijing Institute of Technology
Citations24

Abstract

Section titled ā€œAbstractā€

In this paper, a new micromachined tuning fork gyroscope (TFG) with an anchored diamond coupling mechanism is proposed while the mode ordering and the vibration sensitivity are also investigated. The sense-mode of the proposed TFG was optimized through use of an anchored diamond coupling spring, which enables the in-phase mode frequency to be 108.3% higher than the anti-phase one. The frequencies of the in- and anti-phase modes in the sense direction are 9799.6 Hz and 4705.3 Hz, respectively. The analytical solutions illustrate that the stiffness difference ratio of the in- and anti-phase modes is inversely proportional to the output induced by the vibration from the sense direction. Additionally, FEM simulations demonstrate that the stiffness difference ratio of the anchored diamond coupling TFG is 16.08 times larger than the direct coupling one while the vibration output is reduced by 94.1%. Consequently, the proposed new anchored diamond coupling TFG can structurally increase the stiffness difference ratio to improve the mode ordering and considerably reduce the vibration sensitivity without sacrificing the scale factor.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2009 - A sub-0.2Ā°/hr bias drift micromechanical silicon gyroscope with automatic CMOS mode-matching [Crossref]
  2. 2012 - High-range angular rate sensor based on mechanical frequency modulation [Crossref]
  3. 2012 - Vibration-induced errors in MEMS tuning fork gyroscopes [Crossref]
  4. 2013 - Design of a novel MEMS gyroscope array [Crossref]
  5. 2014 - The development of micromachiend gyroscope structure and circuitry technology [Crossref]
  6. 2003 - Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope [Crossref]
  7. 2015 - Analysis of frequency response and scale-factor of tuning fork micro-gyroscope operating at atmospheric pressure [Crossref]

Reads Similar to This

Design, Simulation & Analysis of SOI based Micro Piezoresistive Pressure Sensor for High Temperature Applications Selection of materials for multilayered structures to be used in packageless sensors Design Method for Mode Matching of a Novel Diamond Honeycomb-Like Disk Resonator Gyroscope with High Shock Resistance