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Morphology and Structure Properties of Boron-doped Diamond Films Prepared by Hot Cathode Direct Current Plasma Chemical Vapor Deposition

MetadataDetails
Publication Date2016-05-19
JournalMaterials Science
AuthorsMengmei Pan, Hongyan Peng, Wanbang Zhao, Hongwei Jiang
InstitutionsHainan Normal University, Dalian University of Technology

Boron-doped diamond (BDD) films were deposited by hot cathode direct current plasma chemical vapor deposition (HCDC-PCVD) according to various mixture