Morphology and Structure Properties of Boron-doped Diamond Films Prepared by Hot Cathode Direct Current Plasma Chemical Vapor Deposition
At a Glance
Section titled âAt a Glanceâ| Metadata | Details |
|---|---|
| Publication Date | 2016-05-19 |
| Journal | Materials Science |
| Authors | Mengmei Pan, Hongyan Peng, Wanbang Zhao, Hongwei Jiang |
| Institutions | Hainan Normal University, Dalian University of Technology |
Abstract
Section titled âAbstractâBoron-doped diamond (BDD) films were deposited by hot cathode direct current plasma chemical vapor deposition (HCDC-PCVD) according to various mixtureâŠ