Fabrication and evaluation of CVD diamond resonators
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2016-08-01 |
| Authors | Yuya Mochimaru, Masaya Toda, Takahito Ono |
| Institutions | Tohoku University |
Abstract
Section titled āAbstractāIn this paper, thin film diamond resonators on Si wafer for high sensitivity force sensing have been developed. Patterned diamond structures have been formed on Ir/YSZ/Si substrate. The completed diamond resonator of cantilever shows a resonance frequency of 51.0 kHz with a quality factor of 14911. The both clamped resonator shows the force sensitivity of 3.36Ć10 <sup xmlns:mml=āhttp://www.w3.org/1998/Math/MathMLā xmlns:xlink=āhttp://www.w3.org/1999/xlinkā>-13</sup> N/Hz <sup xmlns:mml=āhttp://www.w3.org/1998/Math/MathMLā xmlns:xlink=āhttp://www.w3.org/1999/xlinkā>0.5</sup> at 229.3 kHz with 23500 of Q factor. While the crystallites and surface roughness are required to be improved, the patterned diamond resonator can be used as a high sensitive physicochemical sensing tool.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
Section titled āReferencesā- 0 - Single Crystal Diamond Growth on Iridium
- 2014 - A route to diamond wafers by epitaxial deposition on silicon via iridium yttria-stabilized