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Heterogeneously integrated waveguide-coupled photodiodes on silicon-on-diamond (SOD)

MetadataDetails
Publication Date2016-09-20
JournalProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
AuthorsXiaojun Xie, Anand Ramaswamy, Yang Shen, Zhanyu Yang, Matt Jacob-Mitos
InstitutionsUniversity of Virginia, Aurrion (United States)

We report on InP-based high power modified uni-traveling carrier (MUTC) photodiodes heterogeneously integrated on silicon on diamond (SOD) waveguides. Typical dark currents of MUTC photodiodes on SOD waveguides are 20 nA at - 5 V bias voltage. A 50-&mu;m long photodiode has an internal responsivity of 1.07 A/W at 1550 nm wavelength. The bandwidths of photodiodes with active areas of 14&times;25 &mu;m<sup>2</sup>, 14&times;50 &mu;m<sup>2</sup>, 14&times;100 &mu;m<sup>2</sup> and 14&times;150 &mu;m<sup>2</sup> are 22 GHz, 16 GHz, 10 GHz and 7 GHz, respectively. The maximum output RF powers of 14&times;100 &mu;m<sup>2</sup> photodiodes are 13 dBm, 14.4 dBm and 15.3 dBm at 10 GHz, respectively. The maximum DC dissipated power is 0.67 W. To our knowledge, this is the first demonstration of III-V photodiodes integrated on SOD waveguides.

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