Formation of singular (001) terraces on the surface of single-crystal HPHT diamond substrates
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2016-12-01 |
| Journal | Semiconductors |
| Authors | P. A. Yunin, Yu. N. Drozdov, Š. Š. Š§ŠµŃŠ½Š¾Š², V. A. Isaev, Š”. Š. ŠŠ¾Š³Š“Š°Š½Š¾Š² |
| Institutions | Institute for Physics of Microstructures, Institute of Applied Physics |
| Citations | 3 |
Abstract
Section titled āAbstractāMethods of the experimental diagnostics and control of the misorientation angle for single-crystal HPHT (High Pressure High Temperature) diamond substrates are discussed. Such substrates are used for the homoepitaxial growth of doped and undoped CVD diamond layers. The formation of singular (001) terraces on the surface of HPHT diamond after microwave-discharge-plasma etching in pure hydrogen or a hydrogen-oxygen mixture is observed. This phenomenon can be used for rapid determination of the substrate misorientation and to improve the control precision of the deviation angle during substrate polishing, or for obtaining large singular (001) areas of single-crystal diamond substrates.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
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