Stiffness-mass decoupled silicon disk resonator for high resolution gyroscopic application with long decay time constant (8.695 s)
At a Glance
Section titled “At a Glance”| Metadata | Details |
|---|---|
| Publication Date | 2016-12-26 |
| Journal | Applied Physics Letters |
| Authors | Xin Zhou, Dingbang Xiao, Xuezhong Wu, Yulie Wu, Zhanqiang Hou |
| Institutions | National University of Defense Technology |
| Citations | 32 |
Abstract
Section titled “Abstract”We propose a stiffness-mass decoupling concept for designing large effective mass, low resonant frequency, small size, and high quality factor micro/nanomechanical resonators. This technique is realized by hanging lumped masses on the frame structure. An example of a stiffness-mass decoupled silicon disk resonator for gyroscopic application is demonstrated. It shows a decay time constant of 8.695 s, which is at least 5 times longer than that of the pure frame silicon disk resonator and is even comparable with that of the micromachined three-dimensional wine-glass resonators made from diamond or fused silica. The proposed design also shows a Brownian noise induced angle random walk of 0.0009°/√h, which is suitable for making an inertial grade MEMS gyroscope.