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Impedance study of undoped, polycrystalline diamond layers obtained by HF CVD

MetadataDetails
Publication Date2017-04-01
JournalApplied Physics A
AuthorsK. Paprocki, K. Fabisiak, Anna Dychalska, Mirosław Szybowicz, Alina Dudkowiak
InstitutionsMahambet Otemiusly West Kazakhstan University, Poznań University of Technology
Citations4

In this paper, we report results of impedance measurements in polycrystalline diamond films deposited on n-Si using HF CVD method. The temperature was changed from 170 K up to RT and the scan frequency from 42 Hz to 5 MHz. The results of impedance measurement of the real and imaginary parts were presented in the form of a Cole-Cole plot in the complex plane. In the temperatures below RT, the observed impedance response of polycrystalline diamond was in the form of a single semicircular form. In order to interpret the observed response, a double resistor-capacitor parallel circuit model was used which allow for interpretation physical mechanisms responsible for such behavior. The impedance results were correlated with Raman spectroscopy measurements.

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