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A Recent Patent on Microwave Plasma Chemical Vapor-Deposited Diamond Film on Cutting Tools

MetadataDetails
Publication Date2017-07-27
JournalRecent Patents on Mechanical Engineering
AuthorsLing Zhang, Dejun Kong
InstitutionsChangzhou University

Background: Among the various technologies for the chemical vapor deposition of diamond, Microwave Plasma CVD (MPCVD) is a widely used technique for high quality diamond films. It has been proven that the growth rate and quality of diamond can be improved by increasing the plasma power density and gas pressure. Keywords: Cutting tools, diamond film, experimenetal system, MPCVD, surface quality, technological parameter.