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6CCVD Research

Design of a resonant accelerometer integrated with a diamond like carbon film temperature sensor

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2017-10-01
AuthorsBo Li, Yulong Zhao, Xin Ma, Cun Li, Qi Zhang
InstitutionsXiā€™an Jiaotong University
Citations1

Abstract

Section titled ā€œAbstractā€

The design, fabrication and testing of a novel resonant accelerometer integrated with a temperature sensor is presented in this paper. The accelerometer consists of double quartz resonators and a silicon substrate. A novel diamond like carbon (DLC) film with special electrical property, excellent mechanical property and chemical stability, which has negative temperature coefficient of resistance (TCR), is employed to fabricate temperature sensors on the silicon substrate. Two types of DLC are prepared, one was hydrogenated amorphous carbon (A-C:H) films, the other one did not contain hydrogen. The test results demonstrate the feasibility of the proposed temperature sensor.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2017 - A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift [Crossref]

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