Skip to content

Properties of planar structures based on Policluster films of diamond and AlN

MetadataDetails
Publication Date2018-01-01
JournalIOP Conference Series Materials Science and Engineering
AuthorsА. F. Belyanin, А. П. Лучников, С.А. Налимов, Alexander Bagdasarian
InstitutionsCentral Research Institute for Machine Building, Institute of Radio-Engineering and Electronics
Citations2

AlN films doped with zinc were grown on Si substrates by RF magnetron reactive sputtering of a compound target. Policluster films of diamond doped with boron were formed on layered Si/AlN substrates from the gas phase hydrogen and methane, activated arc discharge. By electron microscopy, X-ray diffraction and Raman spectroscopy the composition and structure of synthetic policluster films of diamond and AlN films were studied. Photovoltaic devices based on the AlN/PFD layered structure are presented.