High-Power, Solid-State, Deep Ultraviolet Laser Generation
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2018-02-03 |
| Journal | Applied Sciences |
| Authors | Hongwen Xuan, Hironori Igarashi, Shinji Ito, Chen Qu, Zhigang Zhao |
| Institutions | The University of Tokyo |
| Citations | 53 |
Abstract
Section titled āAbstractāAt present, deep ultraviolet (DUV) lasers at the wavelength of fourth harmonics of 1 Ī¼m (266 nm/258 nm) and at the wavelength of 193 nm are widely utilized in science and industry. We review the generation of these DUV lasers by nonlinear frequency conversion processes using solid-state/fiber lasers as the fundamental frequency. A DUV laser at 258 nm by fourth harmonics generation (FHG) could achieve an average power of 10 W with a beam quality of M2 < 1.5. Moreover, 1 W of average power at 193 nm was obtained by sum-frequency generation (SFG). A new concept of 193-nm DUV laser generation by use of the diamond Raman laser is also introduced. A proof-of-principle experiment of the diamond Raman laser is reported with the conversion efficiency of 23% from the pump to the second Stokes wavelength, which implies the potential to generate a higher power 193 nm DUV laser in the future.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
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